Hitachi FlexSEM1000-II
High Resolution, Compact Scanning Electron Microscope
Beschrijving
FlexSEM1000-II is a very compact fully PC controlled high-performance scanning electron microscope with tungsten hairpin filament electron source, enabling sophisticated imaging and analysis within an accelerating voltage range from 300V to 20kV. Operation is possible in standard high vacuum, but also in a low-vacuum environment with chamber pressures between 6Pa and 100Pa; mode switching is done by a simple mouse click without need for insertion of additional apertures or detectors. Optionally, FlexSEM1000-II can be equipped with an EDX system which will be fully integrated into the SEM unit.